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Properties of PZT [35–36] and LNO films [37]. Compliance matrix elements (elastic compliance constants, Sij) and coupling matrix elements (piezoelectric coefficients, dij) have the units of 
and 
, respectively.
| Material | Relative permittivity | Poisson’s ratio | Elastic compliance constants | Piezoelectric coefficients | ||||||
|
|
|
|||||||||
| S 11 | S 12 | S 13 | S 33 | d 15 | d 31 | d 33 | ||||
|
| ||||||||||
| PZT | 600 | 0.32 | 13.8 | −4.07 | −5.8 | 20.7 | 494 | −93.5 | 223 | |
| LNO | –∞ | 0.27 | ||||||||
