Encoder
|
Typical Resolution
|
Typical Footprint
|
Advantages
|
Shortcomings
|
Fiber |
<1 pm [27] |
cm scale |
Low cost, high resolution |
Low-level miniaturization |
Waveguides |
<10 pm [42] |
35 × 260 µm2 [42] |
Low cost, structure variability |
Relatively larger footprint |
Random structure |
<0.75 µm [46] |
25 µm radius [46] |
High resolution, smaller footprint |
Large loss for scattering, structure uncertainty |
Nanowires |
<10 nm [56] |
0.5 × 75 µm2 [56] |
Very small size, easy to combine with CCD |
Relatively lower resolution |
PhC |
<0.1 nm [64] |
0.6 × 114 µm2 [64] |
High resolution, cost effectiveness |
Manufacture error sensitivity, larger footprint |
QD |
<1 nm [75] |
cm scale, compatible with CCD |
Easy to combine with CCD, small footprint |
Similar responses function for QDs restrict resolution |
Meta-surfaces |
<0.8 nm [85] |
cm scale, compatible with CCD |
Large design freedom, structure variability |
Relatively lower resolution |
Tunable devices |
<5 pm [131] |
16 × 9 µm2 [136] |
High resolution, small footprint |
Environment sensitivity, more sophisticated manufacturing |