Laser parameters for generation of anisotropic grooves (AG) and conical spikes (CS).
| Kind of microstructures | Power (W) | Repetition rate (Hz) | Step (μm) | Speed (mm s−1) | Pulse duration (fs) |
|---|---|---|---|---|---|
| AG | 5 | 600 | 7.5 | 500 | 266 |
| CS | 5 | 100 | 2.5 | 100 | 266 |
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