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(A) A line profile scan across multiple FLMP-etched depths into tungsten sheet at a constant fluence of 353.47 J/cm2 and at different CNC processing speeds. A pitch of 5 µm was used, and the different speeds in mm/s are shown below each depth. (B) An exponential decay fitting based on measured experimental data points (black squares) as a function of the CNC processing speed. The theoretical fitting results are given on the graph.
