Table 4.

AFM parameters of GaN/PSi nanostructures prepared at various laser fluences.

Laser fluence (mJ/mm2)	Root-mean-square height (nm)	Maximum height (nm)	Average surface roughness (nm)	Average diameter (nm)
530	15.962	78.011	13.832	34.411
618	34.411	131.701	28.423	72.051
707	46.822	154.321	42.521	85.932
795	59.012	265.301	50.610	178.83
884	33.853	179.702	26.012	112.222