TABLE 4.

Source width and local gamma criterion with the respective passing rate in x‐direction.

xFWHM (cm)	3%/3 mm	2%/2 mm	1%/1 mm
0.20	100	92.3	42.3
0.21	100	96.2	53.8
0.22	100	100	76.0
0.23	100	100	80
0.24	100	100	92
0.25	100	100	100
0.26	100	100	96
0.27	100	100	84