Table 1.

Structural and superconducting properties of 50 nm NbN on an AlN-buffered 300 mm Si wafer.

Location	TC (K)	ΔTC (K)	(111) FWHM (°) *	Grain Size (nm)
R = 0 mm	16.66	0.104	0.224	38.9
R ~ 72.5 mm	16.62	0.105	0.237	36.8
R ~ 145 mm	16.41	0.075	0.266	32.8

* FWHM of the NbN (111) diffraction peak in 2θ-ω scan.