Table 2.
Year | Material | Method | Substrate | Gas Detected | Main Results | Refs. |
---|---|---|---|---|---|---|
2018 | Soot template TiO2 fractals | Chemical vapor deposition (CVD) | Deposited soot template (a layer of candle soot was deposited on Ti/Pt electrodes) | Acetone vapour |
Novel structural design/diabetic concentrations in the breath. | [134] |
2018 | TiO2 films | Atomic layer deposition (ALD) | Alumina sensors and microscope slides |
NH3 and CH4 |
Sensitivity toward NH3 varied with thickness. |
[135] |
2019 | TiO2 NP | Bar coating | Alumina | H2S | Works at RT under UV. | [136] |
2019 | MgO:TiO2 thin films | Co-sputtering (confocal sputtering) | Pt/SiO2/Si | CH4 | All the results showed that the dopant can improve the electrical performance and sensor properties. | [137] |
2019 | Nanostructured TiO2 | Molecular layering (ML) | Al2O3 substrates with platinum electrodes |
O2 | ML-deposited TiO2 film shows good selectivity to oxygen. | [138] |
2021 | TiO2 thin film | Pulsed laser deposition (PLD) | -(100) silicon (Si/SiO2) -(100) SrTiO3 (STO) -polycrystalline Al2O3 |
H2S | The surface of PLD TiO2 film on Si/SiO2 has a higher roughness than that on the STO substrate. | [139] |
Composite heterostructure | ||||||
2018 | p-copper oxide thin film/n-TiO2Nts heterostructure |
Anodization/ oxidation |
Ti foil | H2, ethanol, acetone, chloroform, and NO2 | The improvement in the sensing properties is attributed to the heterojunction between the CuO thin film and the TiO2 NTs. | [140] |
2018 | TiO2 + SnO2 NPs | SG+ | Glass | NH3 | The improvement in the sensor performance is due to the increased active surface area and the efficient electron–hole charge separation and transfer. | [141] |
2019 | Pd/Al2O3/TiO2 thin film heterostructure | Atomic layer deposition (ALD) | Quartz | H2 | Development of flexible gas sensors. | [142] |
2019 | TiO2/perovskite heterojunctions | Electrochemical method, Sol–gel |
Ti foil | CO | The heterojunction is more sensitive than a single film and could operate at lower temperatures. | [143] |
2019 | TiO2 film/carboxyl PP film/MWCNTs | ALD/CCVD | Si/SiO2 | CO, H2, and NH3 | Better sensor response, lower detection limit, and lower operation temperature against H2 compared to the separate sensors. | [144] |
2019 | Polyaniline (PANI)/TiO2 core–shell nanofibers | In situ chemical polymerization on electrospun TiO2 nanofibers | Glass | NH3 | Under UV at RT at different humidity levels. | [145] |
2019 | TiO2/SnO2 and TiO2/CuO thin film nano-heterostructures | Reactive magnetron sputtering | Metallic target and a-SiO2 |
NO2 | The response of TiO2/SnO2 to NO2 at 150 °C is double than in the case of pure SnO2. | [146] |
2019 | ZnO (n-type)-TiO2 (n-type)-PANI (p-type) Micro/nanoballs |
Chemical deposition technique | Glass | LPG, NO2, acetone, NH3, and CO2 | Very good selectivity. | [130] |
2020 | TiO2 decorated with Au NPs |
Irradiation with laser | Si and interdigital electrodes |
Volatile organic compounds | Very selective and stable over time; works at RT. | [147] |
2022 | Pd doped CoTiO3/TiO2 (Pd-CTT) | HT | Interdigital electrodes | Benzene | Works at RT; good resistance to humidity interference. | [148] |