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. 2023 Dec 12;13:22002. doi: 10.1038/s41598-023-49097-y

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© The Author(s) 2023

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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SEM images of an arrayed NOA before and after sputtering a gold film based on designed configuration such as each single NOA with a bottom diameter of 280 nm and a top angle of 50° and an arrangement period of 500 nm. (a) Top viewing of the fabricated silicon NOAs (scalar bar 550 nm); (b) 3D viewing of the same silicon NOAs (scalar bar 500 nm); (c) 3D viewing of the silicon Au NOAs (scalar bar 250 nm).