| THz | Terahertz |
| PCA | Photoconductive antenna |
| LAPCA | Large-aperture photoconductive antenna |
| OPTP | Optical pump–Terahertz probe |
| CVD | Chemical vapor deposition |
| MEMS | Micro-electro-mechanical system |
| MPCVD | Microwave plasma chemical vapor deposition |
| GHz | Gigahertz |
| DMSO | Dimethylsulfoxide |
| Si | Silicon |
| PCD | Polycrystalline diamond |
| SEM | Scanning electron microscope |
| SE | Secondary emission |
| BSE | Backscattered electron |
| LiNbO | Lithium niobate |
| ZnTe | Zinc telluride |
| BBO | Beta-barium borate |
| HPHT | High pressure–high temperature |