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. 2024 Jan 4;14(1):127. doi: 10.3390/nano14010127

Figure 13.

Figure 13

Surface morphology of silicon wafers before (left) and after (right) polishing with polishing slurries containing different polyamines: (a) reference (REF), (b) EDA, (c) DETA, (d) TETA, (e) TEPA, and (f) PEHA. Blue areas indicate depressions and red areas indicate protrusions.