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. 2023 Dec 20;14(1):20. doi: 10.3390/nano14010020

Figure 1.

Figure 1

Simplified sketch of a typical MBA-on-CMOS with Si cap for hermetical sealing. The cap is cut to reveal the interior cavity. Dimensions are not to scale. For instance, the width of the MBA sensor area might be approximately 10 mm for a resolution of 640 × 512 pixels and pixel size of 17 µm × 17 µm.