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(a,b) Transmission for one-sided B-Si with no oxide etch (sample #6), 4 min oxide etch (sample #2), and 4 min oxide etch stored 7 months in ambient atmosphere. Upper and lower dashed lines show the theoretical transmission through 500 µm thick Si with perfect ARC on one side and no ARC, respectively. (b) shows the zoom-in the wavelength range 7–11 µm.
