Fig. 1. Overview of MEMS scanner concept, design, fabrication, and completed device.

a Concept for the proposed MEMS image acquisition scanner. Orange indicates the direction of source light; blue indicates the reflected light collected by the scanning fiber. This paper only discusses the control and illumination of the scanning fiber. b Diagram of the “push-pull” scanner. c Cross section of fabrication process flow: (i) stainless steel preparation, (ii, iii) aerosol deposition of PZT (patterning by lift-off process), (iv, v) Ti/Pt electrode deposition by lift-off process, (vi) attachment of tapered optical fiber with epoxy. d Photograph of the completed scanner; dimensions 17 × 10 mm