Table 1.
Modal analysis results
| Mode | Full System (Hz) | Actuator (Hz) | Static etched fiber (Hz) | Quasistatic etched fiber (Hz) | Mode | Full System (Hz) | Actuator (Hz) |
|---|---|---|---|---|---|---|---|
| 1 | 238 | 224 | 1271.3 | 3188 | 13 | 5729 | 7162 |
| 2 | 402 | 402 | 1276.3 | 3190 | 14 | 5778 | 7328 |
| 3 | 1206 | 1203 | 7983.2 | 5774 | 15 | 6186 | 7952 |
| 4 | 1444 | 1444 | 8016.1 | 5779 | 16 | 7171 | 8680 |
| 5 | 1908 | 1906 | 10536 | 8907 | 17 | 7329 | 10109 |
| 6 | 2872 | 2872 | 10560 | 8929 | 18 | 7917 | 10461 |
| 7 | 3152 | 3141 | 22849 | 10500 | 19 | 8688 | 10564 |
| 8 | 3189 | 3647 | 22934 | 10531 | 20 | 8790 | 12116 |
| 9 | 3190 | 4302 | 29623 | 13170 | 21 | 8925 | |
| 10 | 3647 | 4801 | 13197 | 22 | 9818 | ||
| 11 | 4268 | 6197 | 23 | 10332 | |||
| 12 | 4801 | 6350 |