Table 3.
Summary of various MEMS-based scanning micro imaging systems
| Scanning Methods | Actuator/System Size (mm3) | Scanning Frequency (Hz) | Field of view (o or μm2) | Spatial/line resolution (μm/) | Operating Condition (V) | Reference |
|---|---|---|---|---|---|---|
| Electrostatic MEMS Micro mirror | 3.0x3.0 (actuator)/10x5(OD) (system) | >900 | ±6° | <5 µm(optical)/12μm transverse resolution/150x120pixels | >+100 V (for both V and H input, linear vibration) | Aguirre et al.74 |
| Electromagnetic MEMS Micro mirror | 2.4x2.9(actuator)/12x2.8(OD) (system) | >350 | ±30° | 5 µm(optical) 23 µm transverse resolution/60x40 pixels | ±1.2 V (V) and ±4 V(H) input, linear vibration | Kim et al.75 |
| Piezoelectric MEMS Micro mirror | 7x5(actuator)a/N.A. (system) | 1000 (0.6x0.8 mirror size) | ±7° | N.A. | +20 V (for both V and H input, linear vibration) | Gilchrist et al.76 |
| Electrothermal MEMS Micro mirror | 1.5x1.5(actuator)/25x4 (OD) (system) | 46 | ±17° | 20 µm/25x25pixels | +1.7 V (for both V and H input, linear vibration) | Xu et al.77 |
| Scanning fiber endoscope |
4x0.45(OD) (actuator)/ 9x1.2(OD) (system) |
11000 (V&H with phase shift to generate circular scan) | 75° | 2 µm/>500lines | <+20 (for both V and H input, linear vibration) | Seibel et al.78 |
| Electrothermal MEMS fiber scanner |
1.28x7x0.44 (device)/ 1.28x20x0.44 (system) |
218.4(V)/239.4(H) Lissajous scan |
451 × 558 | >20 µm (based on the scanning image) | +16 (for both V and H input, linear vibration) | Seo et al.79 |
| Fully Integrated MEMS waveguide Scanner | 3.0x3.0x0.5(actuator)/8.0 × 8.0 × 1.0 (system) | 201(V)/20(H) Raster scan | 4.1° × 1.1°/130 × 19 | 20 μm | +150 V input (for bth V and H input, non resonating linear vibration) | Wang et al.35 |
| PZT-Actuated Fiber MEMS Scanner |
7.0x6.0x0.07(actuator)/ 17x10x0.07 (system) |
8005 (Circular scan) | 10°/60 × 60 | 3 µm at fiber tip 5 µm after GRIN lens/800lines | +10 V (Single input, nonlinear vibration) | Wang et al. |
aOnly utilizes a single mirror, and would require two mirrors to create orthogonal direction scanning