Table 1.
BM1 | ||||||||||||
Rib 1 | Rib 2 | Rib 3 | Rib 4 | |||||||||
w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | |
1000 | 8000 | 1:8 | 500 | 4000 | 1:8 | 250 | 2000 | 1:8 | 125 | 1000 | 1:8 | |
BM2 | ||||||||||||
Rib 1 | Rib 2 | Rib 3 | Rib 4 | |||||||||
w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | |
500 | 3000 | 1:6 | 250 | 3000 | 1:12 | 160 | 3000 | 1:19 | 125 | 3000 | 1:24 | |
BM3 | ||||||||||||
Rib 1 | Rib 2 | - | ||||||||||
w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | |||||||
500 | 2500 | 1:5 | 250 | 2500 | 1:10 | |||||||
BM4 | ||||||||||||
Rib 1 | Rib 2 | Rib 3 | Rib 4 | |||||||||
w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | |
50 | 30 | 1.7:1 | 80 | 60 | 1.3:1 | 250 | 50 | 5:1 | 500 | 50 | 10:1 | |
BM5 | ||||||||||||
Rib 1 | Rib 2 | Rib 3 | - | |||||||||
w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | w (µm) |
h (µm) |
w/h | ||||
10 | 10 | 1:1 | 25 | 25 | 1:1 | 50 | 50 | 1:1 |