| U11 | U22 | U33 | U12 | U13 | U23 | |
| Ca1 | 0.0176 (3) | 0.0092 (3) | 0.0144 (3) | 0.000 | 0.00529 (18) | 0.000 |
| Si1 | 0.0181 (3) | 0.0090 (3) | 0.0140 (3) | 0.0000 (2) | 0.0059 (2) | 0.0000 (2) |
| F1 | 0.0251 (5) | 0.0124 (4) | 0.0201 (5) | 0.0025 (4) | 0.0091 (4) | 0.0041 (3) |
| F2 | 0.0189 (5) | 0.0155 (4) | 0.0190 (5) | −0.0010 (3) | 0.0056 (4) | −0.0037 (3) |
| F3 | 0.0201 (5) | 0.0120 (5) | 0.0185 (5) | −0.0003 (3) | 0.0080 (4) | −0.0020 (3) |
| O1 | 0.0199 (6) | 0.0145 (6) | 0.0224 (6) | −0.0008 (4) | 0.0058 (5) | 0.0006 (4) |