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. 2023 Nov 23;4(1):20230109. doi: 10.1002/EXP.20230109

FIGURE 2.

FIGURE 2

Optimization and characteristics of capacitive pressure sensor (CPS). (A) Working principle of the CPS. (B) Relative capacitance variation‐pressure curve for different additive BaTiO3 content (0, 5%, 10%, 15% wt%) in the range of 0∼500 kPa. (C) Real‐time capacitance variation and the corresponding applied stepped pressure‐time curves. (D) Relative capacitance variation at different external pressures (0.4, 65, 140, 220, 310, 420, and 500 kPa). (E) Relative capacitance variation at the pressure detection limit of 0.4 kPa. (F) Response and recovery time of the CPS for rising and falling loads. (G) Hysteresis response of CPS. (H) 4000‐cycle repeatability of the sensor under an applied pressure of 95 kPa.