Table 1.

Gas flow rates, deposition rate, and refractive index for SiON_x or SiONP_x layers deposited by PECVD.

Sample	Coating	Gas Flow Rate (sccm)				Deposition Rate (nm/min)	Refractive Index (n)
		15% SiH4/Ar	N2O	N2	NH3
1	SiONx	24	160	225	50	62.5	1.45
2		24	155	225	50	59.5	1.57
3		24	16	225	50	44.5	1.65
4		24	3	225	50	41.0	1.82
5		24	0	225	50	36.5	2.0
		15%SiH4/2%PH3/Ar	N2O	N2	NH3	Deposition Rate	Refractive index (n)
6	SiONPx	24	16	225	50	38.5	1.68