| BEOL | Back-End of the Line |
| BTI | Bias Temperature Instability |
| EDMOS | Extended-Drain Metal Oxide Semiconductor |
| HBD | Hard Breakdown |
| HCD | Hot-Carrier Damage |
| HH | Hot Hole |
| HKMG | High-K Metal Gate |
| II | Impact Ionization |
| LOCOS | Locally Oxidized Silicon |
| MOSFET | Metal-Oxide-Semiconductor Field Effect Transistor |
| PBTI | Positive Bias Temperature Instability |
| QS | Quasi-Static |
| STI | Shallow Trench Isolation |
| SPAD | Single Photon Avalanche Diode |
| FDSOI | Fully Depleted Silicon on Insulator |
| TSV | Through Silicon Via |