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. 2024 Feb 13;15(2):269. doi: 10.3390/mi15020269

Figure 5.

Figure 5

Comparison of activation energy, Ea, of NBTI in GAA NS fabricated on (100) vs. (110) surface orientations, showing a higher Ea in (100) than (110) surface orientation [14]. Reprinted/adapted with permission from IEEE Proceedings of the 2020 International Reliability Physics Symposium.