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Area scaling comparison for NS nFETs with (a) no-dipole, (b) p-dipole source, and (c) n-dipole source in gate stacks and NS pFETs with (d) no-dipole, (e) p-dipole source, and (f) n-dipole source in gate stacks. All follow Weibull statistics and Poisson area scaling statistics [44]. Reprinted/adapted with permission from IEEE Proceedings of the 2021 International Reliability Physics Symposium.
