Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Cross-sectional schematics after key steps in the special process flow in [11] to evaluate inner spacer TDDB: (a) after channel release, (b) after Si trimming, (c) complete channel oxidation, and (d) after HKMG process. Reprinted/adapted with permission from IEEE Proceedings of the 2020 International Reliability Physics Symposium.
