Table 1.

Summary of key architectural elements of NS and their impact on device reliability. BT. stands for better than; * NIE stands for no impact expected; and ** NR is short for not reported. *** Expected from the corner field and surface orientation impact at different sheet widths.

Mechanisms	PBTI	NBTI	HCI	SHE	Gox TDDB	MOL TDDB
Surface orientation	NIE *	Yes	Yes	NIE *	Yes	NIE *
(100) BT. (110)?	[10]	[10,14]	[18]		[43]
Tsi: 9 nm and below	Yes	Yes	Yes	Worse	Yes	NR **
Thicker BT. Thinner?	[10]	[10]	[18,23]	[38]	[22]
Wsheet	NIE *	Yes	Worse	Worse	Yes ***	NR **
Wider BT. Narrow?		[10,14]	[12,18,24]	[12,25,36]	[10,43]