Table 2. EXAFS Fitting Results for (Al_0.75Sc₂₅)N, (Al_0.70Sc₃₀)N, ScN Powder, (Al_0.75Y₂₅)N, and Y Foil^a,^b.

sample	path	CN	S02	R (Å)	σ2 (Å2)	ΔE0 (eV)
Al0.75Sc0.25N	Sc–N	4	0.81 ± 0.27	2.11 ± 0.03	0.005 ± 0.005	1.0 ± 3.4
Al0.70Sc0.30N	Sc–N	4	0.69 ± 0.17	2.12 ± 0.02	0.004 ± 0.004	–0.5 ± 2.6
ScN	Sc–N	6	0.34 ± 0.05	2.27 ± 0.03	0.001 ± 0.003	2.4 ± 3.9
	Sc–Sc	12	0.34 ± 0.05	3.19 ± 0.01	0.001 ± 0.001	–3.0 ± 1.5
Al0.75Y0.25N	Y–N	3.7 ± 1.3	0.82	2.24 ± 0.03	0.000 ± 0.006	–4.2 ± 3.3
Y foil	Y–Y	12	0.82 ± 0.16	3.61 ± 0.01	0.014 ± 0.002	–0.8 ± 0.9
AlN25	Al–N	4		1.92 ± 0.01

^aCN is the coordination number (i.e., number of nearest neighbors at distance R per absorbing atom); R is the first near neighbor distance; σ² is the mean squared relative bond disorder (also referred to as the EXAFS Debye–Waller factor); ΔE₀ is the correction in the photoelectron energy origin, and S₀² is the amplitude reduction factor.

^bReference to structural AlN data from the literature.²⁵