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| oxide formula | film density (g/cm3) | density source | OAD (cm–2) |
|---|---|---|---|
| Al2O3 | 2.9 | various methods28 | 1.48 × 1015 |
| HfO2 | 9.4 | XRR29 | 1.42 × 1015 |
| TiO2 | 3.7 | XRR30 | 1.45 × 1015 |
| MgO | 3.4 ± 0.2 | XRR (in-house) | 1.37 × 1015 |
| Nb2O5 | 3.8 ± 0.4 | XRR (in-house) | 1.23 × 1015 |
| SrO | 3.1 ± 0.1 | XRR (in-house) | 6.90 × 1014 |
| La2O3 | 6.2 ± 0.1 | XRR (in-house) | 1.07 × 1015 |
