Table 7:

Tabulated results from quantifying simulated measurements of a layer of Al2O3 on a layer of CaF2.

Layer 1				Layer 2
Nominal (nm)	Quantified (nm)	O	Al	Quantified (nm)	Thickness (nm)	F	Ca
10	9.24	0.466	0.534	10	9.97	0.489	0.511
10	9.32	0.457	0.543	20	19.8	0.483	0.517
10	9.26	0.454	0.546	35	34.7	0.486	0.514
10	9.27	0.452	0.548	50	49.9	0.487	0.513
10	9.16	0.457	0.543	100	101.2	0.483	0.517
20	18.7	0.456	0.544	10	9.76	0.472	0.528
20	18.5	0.463	0.537	20	19.7	0.478	0.522
20	18.7	0.461	0.539	35	34.4	0.480	0.520
20	18.7	0.456	0.544	50	50.4	0.481	0.519
20	18.8	0.455	0.545	100	100.7	0.483	0.517
35	33.3	0.467	0.533	10	10.13	0.480	0.520
35	33.1	0.464	0.536	20	19.8	0.477	0.523
35	33.2	0.462	0.538	35	34.8	0.483	0.517
35	33.0	0.465	0.535	50	50.0	0.481	0.519
35	33.1	0.460	0.540	100	101.5	0.479	0.521
50	47.4	0.463	0.537	10	9.94	0.481	0.519
50	47.5	0.462	0.538	20	19.9	0.474	0.526
50	47.5	0.465	0.535	35	34.7	0.474	0.526
50	47.6	0.460	0.540	50	50.2	0.479	0.521
50	47.3	0.464	0.536	100	101.7	0.474	0.526
100	96.0	0.464	0.536	10	10.07	0.459	0.541
100	95.8	0.462	0.538	20	19.8	0.472	0.528
100	96.9	0.461	0.539	35	35.3	0.466	0.534
100	96.7	0.461	0.539	50	50.3	0.469	0.531
100	97.5	0.462	0.538	100	103.2	0.470	0.530
Nominal		0.471	0.529	Nominal		0.487	0.513