Table 2. Variation of the convective heat transfer coefficient of LN2/Cu, the temperature of the cooling channel wall and the Cu/Si interface temperature with the flow rate of LN2.

Flow rate of LN2 (L min−1)	Film coefficient of LN2/Cu (W m−2 K−1)	Temperature of cooling channel wall (K)	Temperature of Cu/Si interface (K)
1.4	3000	88.95	90.3
2.03	4000	88.4	90
2.7	5000	86.1	87.7
3.4	6000	84.6	86.2
5	8000	82.7	84.2
6	10000	81.6	83.1
10	15000	80.0	81.6