Table 3. Ray-tracing results of the X-ray beam at the secondary source.
| Without thermal deformation | With thermal deformation | ||||
|---|---|---|---|---|---|
| Photon energy (keV) | Thermal slope error (µrad, RMS) | Beam size (µm) | Divergence (µrad) | Beam size (µm) | Divergence (µrad) |
| 2.05 | 4.6 | 29.1 × 574.1 | 39.4 × 0.67 | 29.6 × 570.0 | 40.0 × 11.8 |
| 2.5 | 1.6 | 29.2 × 493.2 | 34.3 × 0.63 | 30.2 × 510.0 | 36.2 × 12.4 |