Table 2. Statistical properties of the roughness of Mo/B4C MLMs reconstructed from diffuse scattering data.
| Sample | Period | Roughness, Å | Longitudinal correlation, nm (at a frequency of 3 µm−1) | Cross correlation, µm |
|---|---|---|---|---|
| RS-151 | 34.16 | 0.5 | 38 | 9 |
| RS-154 | 29.04 | 0.9 | 142.6 | 9 |
| RS-157 | 24.05 | 0.89 | 76.6 | 10 |
| RS-168 | 18.08 | 0.83 | 32.1 | 9 |
| RS-210 | 16.1 | 0.84 | 37.3 | 9 |
| RS-211 | 13.79 | 0.52 | 83.6 | 10 |
| RS-212 | 12.05 | 1.15 | 53.6 | 10 |
| RS-213 | 9.98 | 1.03 | 49.3 | 9 |
| RS-217 | 8.05 | 1.12 | 20.1 | 10 |