Si1—O1	1.7910 (9)	C14—F3	1.3353 (15)
Si1—O4	1.8042 (9)	C14—C15	1.3814 (19)
Si1—O3	1.8480 (9)	C15—F4	1.3430 (14)
Si1—O2	1.8503 (9)	C15—C16	1.3853 (17)
Si1—C11	1.9559 (12)	C16—F5	1.3557 (14)
Si1—C17	1.9683 (12)	C17—C18	1.3904 (18)
O1—C1'	1.3324 (14)	C17—C22	1.3957 (17)
O1—N1	1.3324 (14)	C18—F6	1.3543 (15)
O2—N1'	1.3244 (14)	C18—C19	1.3903 (18)
O2—C1	1.3244 (14)	C19—F7	1.3431 (18)
O3—C6'	1.3263 (13)	C19—C20	1.377 (2)
O3—N2	1.3263 (13)	C20—F8	1.3452 (17)
O4—N2'	1.3348 (13)	C20—C21	1.375 (2)
O4—C6	1.3348 (13)	C21—F9	1.3462 (17)
N1—C1	1.3562 (14)	C21—C22	1.3874 (18)
N1—C5	1.3714 (16)	C22—F10	1.3513 (16)
C1—C2	1.3686 (17)	C23—C24	1.434 (10)
N2—C6	1.3487 (15)	C23—H23A	0.9800
N2—C10	1.3706 (16)	C23—H23B	0.9800
C6—C7	1.3740 (15)	C23—H23C	0.9800
N1'—C1'	1.3562 (14)	C24—C25	1.553 (8)
N1'—C2	1.3686 (17)	C24—H24A	0.9900
C1'—C5	1.3714 (16)	C24—H24B	0.9900
N2'—C6'	1.3487 (15)	C25—C26	1.552 (10)
N2'—C7	1.3740 (15)	C25—H25A	0.9900
C6'—C10	1.3706 (16)	C25—H25B	0.9900
C2—C3	1.3732 (19)	C26—C27	1.491 (10)
C2—H2	0.9500	C26—H26A	0.9900
C3—C4	1.4013 (19)	C26—H26B	0.9900
C3—H3	0.9500	C27—H27A	0.9800
C4—C5	1.3828 (19)	C27—H27B	0.9800
C4—H4	0.9500	C27—H27C	0.9800
C5—H5	0.9500	O5'—C23'	1.432 (5)
C7—C8	1.3770 (18)	O5'—C26'	1.456 (10)
C7—H7	0.9500	C23'—C24'	1.498 (6)
C8—C9	1.398 (2)	C23'—H23D	0.9900
C8—H8	0.9500	C23'—H23E	0.9900
C9—C10	1.3776 (19)	C24'—C25'	1.482 (8)
C9—H9	0.9500	C24'—H24C	0.9900
C10—H10	0.9500	C24'—H24D	0.9900
C11—C16	1.3923 (16)	C25'—C26'	1.494 (11)
C11—C12	1.3937 (16)	C25'—H25C	0.9900
C12—F1	1.3545 (14)	C25'—H25D	0.9900
C12—C13	1.3851 (17)	C26'—H26C	0.9900
C13—F2	1.3428 (14)	C26'—H26D	0.9900
C13—C14	1.3861 (19)
O1—Si1—O4	166.74 (4)	C12—C13—C14	119.49 (11)
O1—Si1—O3	86.65 (4)	F3—C14—C15	120.33 (12)
O4—Si1—O3	84.60 (4)	F3—C14—C13	120.99 (12)
O1—Si1—O2	85.17 (4)	C15—C14—C13	118.65 (11)
O4—Si1—O2	84.53 (4)	F4—C15—C14	119.78 (11)
O3—Si1—O2	87.56 (4)	F4—C15—C16	120.51 (11)
O1—Si1—C11	91.41 (4)	C14—C15—C16	119.71 (11)
O4—Si1—C11	98.54 (4)	F5—C16—C15	115.00 (10)
O3—Si1—C11	90.16 (4)	F5—C16—C11	120.69 (10)
O2—Si1—C11	175.99 (5)	C15—C16—C11	124.29 (11)
O1—Si1—C17	99.44 (5)	C18—C17—C22	113.39 (11)
O4—Si1—C17	88.68 (4)	C18—C17—Si1	122.91 (9)
O3—Si1—C17	172.66 (4)	C22—C17—Si1	123.45 (9)
O2—Si1—C17	88.88 (5)	F6—C18—C19	115.25 (12)
C11—Si1—C17	93.75 (5)	F6—C18—C17	120.49 (11)
C1'—O1—Si1	112.84 (7)	C19—C18—C17	124.25 (12)
N1—O1—Si1	112.84 (7)	F7—C19—C20	119.76 (13)
N1'—O2—Si1	111.23 (7)	F7—C19—C18	120.96 (14)
C1—O2—Si1	111.23 (7)	C20—C19—C18	119.28 (13)
C6'—O3—Si1	110.81 (7)	F8—C20—C21	120.52 (15)
N2—O3—Si1	110.81 (7)	F8—C20—C19	120.04 (15)
N2'—O4—Si1	111.71 (7)	C21—C20—C19	119.44 (13)
C6—O4—Si1	111.71 (7)	F9—C21—C20	119.99 (13)
O1—N1—C1	114.69 (9)	F9—C21—C22	120.74 (14)
O1—N1—C5	124.26 (10)	C20—C21—C22	119.27 (13)
C1—N1—C5	121.02 (11)	F10—C22—C21	114.91 (11)
O2—C1—N1	114.61 (10)	F10—C22—C17	120.77 (10)
O2—C1—C2	123.66 (10)	C21—C22—C17	124.32 (13)
N1—C1—C2	121.70 (10)	C24—C23—H23A	109.5
O3—N2—C6	114.78 (9)	C24—C23—H23B	109.5
O3—N2—C10	124.02 (10)	H23A—C23—H23B	109.5
C6—N2—C10	121.20 (10)	C24—C23—H23C	109.5
O4—C6—N2	114.45 (9)	H23A—C23—H23C	109.5
O4—C6—C7	124.04 (10)	H23B—C23—H23C	109.5
N2—C6—C7	121.50 (10)	C23—C24—C25	115.3 (6)
O2—N1'—C1'	114.61 (10)	C23—C24—H24A	108.4
O2—N1'—C2	123.66 (10)	C25—C24—H24A	108.4
C1'—N1'—C2	121.70 (10)	C23—C24—H24B	108.4
O1—C1'—N1'	114.69 (9)	C25—C24—H24B	108.4
O1—C1'—C5	124.26 (10)	H24A—C24—H24B	107.5
N1'—C1'—C5	121.02 (11)	C26—C25—C24	109.8 (6)
O4—N2'—C6'	114.45 (9)	C26—C25—H25A	109.7
O4—N2'—C7	124.04 (10)	C24—C25—H25A	109.7
C6'—N2'—C7	121.50 (10)	C26—C25—H25B	109.7
O3—C6'—N2'	114.78 (9)	C24—C25—H25B	109.7
O3—C6'—C10	124.02 (10)	H25A—C25—H25B	108.2
N2'—C6'—C10	121.20 (10)	C27—C26—C25	114.5 (6)
N1'—C2—C3	118.72 (11)	C27—C26—H26A	108.6
C1—C2—C3	118.72 (11)	C25—C26—H26A	108.6
C1—C2—H2	120.6	C27—C26—H26B	108.6
C3—C2—H2	120.6	C25—C26—H26B	108.6
C2—C3—C4	119.88 (12)	H26A—C26—H26B	107.6
C2—C3—H3	120.1	C26—C27—H27A	109.5
C4—C3—H3	120.1	C26—C27—H27B	109.5
C5—C4—C3	120.26 (12)	H27A—C27—H27B	109.5
C5—C4—H4	119.9	C26—C27—H27C	109.5
C3—C4—H4	119.9	H27A—C27—H27C	109.5
C1'—C5—C4	118.42 (11)	H27B—C27—H27C	109.5
N1—C5—C4	118.42 (11)	C23'—O5'—C26'	109.5 (5)
N1—C5—H5	120.8	O5'—C23'—C24'	104.9 (4)
C4—C5—H5	120.8	O5'—C23'—H23D	110.8
N2'—C7—C8	118.54 (11)	C24'—C23'—H23D	110.8
C6—C7—C8	118.54 (11)	O5'—C23'—H23E	110.8
C6—C7—H7	120.7	C24'—C23'—H23E	110.8
C8—C7—H7	120.7	H23D—C23'—H23E	108.8
C7—C8—C9	119.84 (11)	C25'—C24'—C23'	102.3 (4)
C7—C8—H8	120.1	C25'—C24'—H24C	111.3
C9—C8—H8	120.1	C23'—C24'—H24C	111.3
C10—C9—C8	120.24 (12)	C25'—C24'—H24D	111.3
C10—C9—H9	119.9	C23'—C24'—H24D	111.3
C8—C9—H9	119.9	H24C—C24'—H24D	109.2
C6'—C10—C9	118.59 (12)	C24'—C25'—C26'	105.0 (6)
N2—C10—C9	118.59 (12)	C24'—C25'—H25C	110.7
N2—C10—H10	120.7	C26'—C25'—H25C	110.7
C9—C10—H10	120.7	C24'—C25'—H25D	110.7
C16—C11—C12	113.42 (10)	C26'—C25'—H25D	110.7
C16—C11—Si1	123.97 (8)	H25C—C25'—H25D	108.8
C12—C11—Si1	122.43 (8)	O5'—C26'—C25'	104.9 (7)
F1—C12—C13	115.50 (10)	O5'—C26'—H26C	110.8
F1—C12—C11	120.11 (10)	C25'—C26'—H26C	110.8
C13—C12—C11	124.37 (11)	O5'—C26'—H26D	110.8
F2—C13—C12	120.66 (12)	C25'—C26'—H26D	110.8
F2—C13—C14	119.84 (11)	H26C—C26'—H26D	108.8
O4—Si1—O1—C1'	−28.5 (2)	O1—C1'—C5—C4	178.47 (11)
O3—Si1—O1—C1'	−77.23 (8)	N1'—C1'—C5—C4	0.59 (18)
O2—Si1—O1—C1'	10.60 (8)	O1—N1—C5—C4	178.47 (11)
C11—Si1—O1—C1'	−167.31 (8)	C1—N1—C5—C4	0.59 (18)
C17—Si1—O1—C1'	98.65 (8)	C3—C4—C5—C1'	−0.66 (19)
O4—Si1—O1—N1	−28.5 (2)	C3—C4—C5—N1	−0.66 (19)
O3—Si1—O1—N1	−77.23 (8)	O4—N2'—C7—C8	176.47 (11)
O2—Si1—O1—N1	10.60 (8)	C6'—N2'—C7—C8	−3.09 (18)
C11—Si1—O1—N1	−167.31 (8)	O4—C6—C7—C8	176.47 (11)
C17—Si1—O1—N1	98.65 (8)	N2—C6—C7—C8	−3.09 (18)
O1—Si1—O2—N1'	−10.44 (7)	N2'—C7—C8—C9	0.8 (2)
O4—Si1—O2—N1'	161.20 (8)	C6—C7—C8—C9	0.8 (2)
O3—Si1—O2—N1'	76.40 (7)	C7—C8—C9—C10	1.3 (2)
C17—Si1—O2—N1'	−110.02 (8)	O3—C6'—C10—C9	179.41 (13)
O1—Si1—O2—C1	−10.44 (7)	N2'—C6'—C10—C9	−1.0 (2)
O4—Si1—O2—C1	161.20 (8)	O3—N2—C10—C9	179.41 (13)
O3—Si1—O2—C1	76.40 (7)	C6—N2—C10—C9	−1.0 (2)
C17—Si1—O2—C1	−110.02 (8)	C8—C9—C10—C6'	−1.3 (2)
O1—Si1—O3—C6'	154.54 (8)	C8—C9—C10—N2	−1.3 (2)
O4—Si1—O3—C6'	−15.49 (8)	C16—C11—C12—F1	179.86 (10)
O2—Si1—O3—C6'	69.23 (8)	Si1—C11—C12—F1	4.45 (15)
C11—Si1—O3—C6'	−114.06 (8)	C16—C11—C12—C13	1.43 (17)
O1—Si1—O3—N2	154.54 (8)	Si1—C11—C12—C13	−173.97 (9)
O4—Si1—O3—N2	−15.49 (8)	F1—C12—C13—F2	1.51 (17)
O2—Si1—O3—N2	69.23 (8)	C11—C12—C13—F2	180.00 (11)
C11—Si1—O3—N2	−114.06 (8)	F1—C12—C13—C14	−177.48 (11)
O1—Si1—O4—N2'	−31.6 (2)	C11—C12—C13—C14	1.01 (19)
O3—Si1—O4—N2'	17.32 (7)	F2—C13—C14—F3	−3.34 (18)
O2—Si1—O4—N2'	−70.74 (8)	C12—C13—C14—F3	175.65 (11)
C11—Si1—O4—N2'	106.66 (8)	F2—C13—C14—C15	178.54 (11)
C17—Si1—O4—N2'	−159.74 (8)	C12—C13—C14—C15	−2.46 (18)
O1—Si1—O4—C6	−31.6 (2)	F3—C14—C15—F4	2.55 (18)
O3—Si1—O4—C6	17.32 (7)	C13—C14—C15—F4	−179.32 (11)
O2—Si1—O4—C6	−70.74 (8)	F3—C14—C15—C16	−176.71 (11)
C11—Si1—O4—C6	106.66 (8)	C13—C14—C15—C16	1.41 (18)
C17—Si1—O4—C6	−159.74 (8)	F4—C15—C16—F5	0.51 (16)
Si1—O1—N1—C1	−8.78 (12)	C14—C15—C16—F5	179.77 (11)
Si1—O1—N1—C5	173.22 (9)	F4—C15—C16—C11	−178.03 (11)
Si1—O2—C1—N1	8.22 (12)	C14—C15—C16—C11	1.23 (19)
Si1—O2—C1—C2	−173.65 (9)	C12—C11—C16—F5	178.98 (10)
O1—N1—C1—O2	0.12 (14)	Si1—C11—C16—F5	−5.70 (16)
C5—N1—C1—O2	178.19 (10)	C12—C11—C16—C15	−2.56 (17)
O1—N1—C1—C2	−178.04 (10)	Si1—C11—C16—C15	172.76 (9)
C5—N1—C1—C2	0.02 (17)	C22—C17—C18—F6	178.41 (11)
Si1—O3—N2—C6	10.62 (12)	Si1—C17—C18—F6	−7.13 (16)
Si1—O3—N2—C10	−169.72 (11)	C22—C17—C18—C19	−2.95 (19)
Si1—O4—C6—N2	−15.96 (12)	Si1—C17—C18—C19	171.50 (11)
Si1—O4—C6—C7	164.44 (9)	F6—C18—C19—F7	1.0 (2)
O3—N2—C6—O4	3.27 (15)	C17—C18—C19—F7	−177.71 (13)
C10—N2—C6—O4	−176.40 (11)	F6—C18—C19—C20	−179.78 (14)
O3—N2—C6—C7	−177.13 (11)	C17—C18—C19—C20	1.5 (2)
C10—N2—C6—C7	3.20 (18)	F7—C19—C20—F8	−0.9 (3)
Si1—O2—N1'—C1'	8.22 (12)	C18—C19—C20—F8	179.89 (15)
Si1—O2—N1'—C2	−173.65 (9)	F7—C19—C20—C21	179.80 (15)
Si1—O1—C1'—N1'	−8.78 (12)	C18—C19—C20—C21	0.6 (2)
Si1—O1—C1'—C5	173.22 (9)	F8—C20—C21—F9	0.5 (3)
O2—N1'—C1'—O1	0.12 (14)	C19—C20—C21—F9	179.87 (15)
C2—N1'—C1'—O1	−178.04 (10)	F8—C20—C21—C22	179.77 (15)
O2—N1'—C1'—C5	178.19 (10)	C19—C20—C21—C22	−0.9 (3)
C2—N1'—C1'—C5	0.02 (17)	F9—C21—C22—F10	−0.7 (2)
Si1—O4—N2'—C6'	−15.96 (12)	C20—C21—C22—F10	−179.93 (14)
Si1—O4—N2'—C7	164.44 (9)	F9—C21—C22—C17	178.44 (13)
Si1—O3—C6'—N2'	10.62 (12)	C20—C21—C22—C17	−0.8 (2)
Si1—O3—C6'—C10	−169.72 (11)	C18—C17—C22—F10	−178.32 (11)
O4—N2'—C6'—O3	3.27 (15)	Si1—C17—C22—F10	7.26 (17)
C7—N2'—C6'—O3	−177.13 (11)	C18—C17—C22—C21	2.58 (19)
O4—N2'—C6'—C10	−176.40 (11)	Si1—C17—C22—C21	−171.84 (11)
C7—N2'—C6'—C10	3.20 (18)	C23—C24—C25—C26	−72.1 (8)
O2—N1'—C2—C3	−178.57 (11)	C24—C25—C26—C27	173.7 (6)
C1'—N1'—C2—C3	−0.58 (18)	C26'—O5'—C23'—C24'	−20.7 (6)
O2—C1—C2—C3	−178.57 (11)	O5'—C23'—C24'—C25'	34.3 (6)
N1—C1—C2—C3	−0.58 (18)	C23'—C24'—C25'—C26'	−35.2 (7)
N1'—C2—C3—C4	0.5 (2)	C23'—O5'—C26'—C25'	−1.3 (7)
C1—C2—C3—C4	0.5 (2)	C24'—C25'—C26'—O5'	23.2 (8)
C2—C3—C4—C5	0.1 (2)