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. 2024 Mar 7;15:2065. doi: 10.1038/s41467-024-46267-y

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© The Author(s) 2024

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 2 — a Optical layout including a microscope objective (MO), beam splitter (BS), tube lens (TL), camera, illumination system including LED, collimating lens (CL), and image plane pattern (IP) projected at the sample focal plane; an electronics control synchronises the illumination and the scanning with the acquisition, and the scanning is performed through a translation stage that moves the objective. b–e Reconstruction topographic results using the ESFS system: (b) step height measurement; (c) measurement of rugosity standard AIRB40; and (d, e) measurement on regions of a coin. Height profiles across the field of view (in the direction shown in the associated topographies) are depicted in the right graphs of (c–e). In some regions of the measurements shown in (d, e) the sample has a local slope that exceeds the NA of the objective, light reflected off the sample is not captured by the objective, and they appear as non-measured regions.