Fig. 3. Implementation of the ESFS method in a commercial microscope with a fast varifocal lens.
a Scheme of the optical layout including a microscope objective (MO), beam splitter (BS), tube lens (TL), TAG lens, relay lens system (L1 and L2), camera, illumination system including LED, collimating lens (CL), Ronchi pattern and lens (L3); an electronics control synchronises the illumination and the TAG lens driving signal. b Plot of the measured height, in radians, versus the certified height used to calibrate the system. The blue dots depicted in the inset graphs correspond to the certified values; the fitted calibration factor was used to convert phase to heights in the inset graphs. c–e Reconstruction topographic results using the ESFS system: c Colormaps of three step height measurements of 0.5, 1.0, and 2.0 µm. The average height profile for each colormap is shown at the bottom. d Colormap of a tilted mirror, and corresponding height plot (bottom). The red solid line corresponds to the ground-truth value. e Plot of the measured axial position of a flat mirror as a function of its axial location, controlled using a z stage. The dashed orange line corresponds to a line with slope 1.
