Table 2.
Review of key factors for assessing exposure probability and evaluation of maintenance work application for fabrication (FAB) facilities in OHRA.
| Authors | Health hazards covered | Estimation method | Factors to represent exposure potential | Exposure classification | Factors considered for maintenance tasks in FAB facility | References |
|---|---|---|---|---|---|---|
| COSHH (UK, 1998) | Chemicals and dust | Control banding | Physical properties (the dustiness of solids and volatility of liquids) | Dustiness | [23] | |
| Amount used in an operation or batch process | Three levels (small, medium, and large) | Yes∗ | ||||
| Control approaches | Four levels (general ventilation | Yes | ||||
| Crop life (Belgium, 2019) | Chemicals with OES‡ | Semi-quantitative based on control banding | Exposure level and OES | Four levels (<10% OES, 10–50 % OES, 50–100% OES, >OES) | Applicable to hazards with OES | [27] |
| Chemicals without OES | Tentative limit values | Five levels | Applicable to hazards with quantification level | |||
| Solids in mg/m3 (1–10, 0.1–1, 0.01–0.1, <0.01 and expert advice | ||||||
| Liquids in pMW (5–100, 5–50, 0.5–5, <0.5 & expert advice) | ||||||
| University of Queensland (Australia, 2011) | Carcinogens, electricity, manual handling, and infected blood | Qualitative | Frequency of interaction with hazards. No further detailed information to classify the frequency | Five levels (very rare, rare, infrequent, frequent, and continuous) | No† | [28] |
| National Research Ins. for Labour Protection (Romania, 1998) | Chemicals, biological, thermal effect, etc. | Semi-quantitative | Probability of consequences/year | Six levels based on quantitative injury occurrence of consequences. | No | [29] |
| Ministry of Manpower (Singapore, 13) | Chemicals and dust | Semi-quantitative | Exposure rating with weekly exposure level (E) and PEL | Five levels (E/PEL, <0.1, 0.1–<0.5, 0.5–<1.0, 1.0–2.0 and ≥2.0) | Applicable to hazards with OES | [2] |
| Exposure index using vapor pressure or particle size, ratio of odor threshold/PEL, hazard control measures, amount used/week and duration of work/week | Five levels categorized semi-quantitatively by factor | Both amounts used and the level of hazard control in MW | ||||
| NIOSH (US, 2020) | Chemicals without OES§ | Semi-quantitative based on control banding | Occupational exposure bands (OEB) or tentative limit values. | Solids in mg/m3 (>10, >1–10, >0.1–1, >0.01–0.1 and ≤0.01) | [30] | |
| Liquids in ppm (>100, >10–100, >1–10, >0.1–1 and ≤0.1) | Yes | |||||
| Int. Council on Mining & Metals (ICMM, 2009) | Chemicals and dust | Qualitative | OEL exposure band. | Three levels (<0.5 × OES, >0.5–1 × OES, >OES) | Hazards with OES | [31] |
| KOSHA (Korea, 2012) | Chemicals and dust | Qualitative | If measurements with OEL are available. | Four levels (<10 % OES, 10–50 % OES, 50–100 % OES, >OES) | Hazards with OES | [10] |
| If measurements are not available regardless of the presence of OES. | Combination of volatility, dustiness and the amount used per day | Dustiness | ||||
| ECETOC TRA (EU, 2012) | Individual chemicals | Semi-quantitative | Concentration (no mixture), PROC, physical Form of the substance, volatility, amount used, work duration and frequency of use, LEV††, use of personal protective equipment, room size and general ventilation, and dermal exposure controls | Quantitative | [18] | |
| Yes | ||||||
| Stoffenmanager exposure model (Netherlands, 2008) | Individual chemicals | Semi-quantitative algorithm | Concentration (no mixture), type of activity (mixing, spraying, etc.), product characteristics, dustiness, volatility), amount used, work duration and frequency of use, local exhaust ventilation, and use of personal protective equipment | Quantitative | Yes | [19] |
| SEMI (2023) | Semiconductor process and equipment | Qualitative | Number of occurrences of harm No specific factors to assess exposure to health hazards |
Six levels (frequent, likely, possible, rare, unlikely, and not reasonably foreseeable) | No | [6] |
Abbreviations. OHRA: Occupational health risk assessment; COSHH: Control of substances hazardous to health; OES: Occupational exposure standard; MW: Maintenance Work; NIOSH: National Institute for Occupational Safety and Health; KOSHA: Republic of Korea Occupational Safety and Health Agency; ECETOC TRA: European Center for Ecotoxicology and Toxicology of Chemicals Targeted Risk Assessment; LEV: Local exhaust ventilation; SEMI: Semiconductor Equipment and Materials International.
∗
Yes = Certain factors can be used to assess the likelihood of exposure associated with maintenance work in FAB facilities.
†
No = Not applicable for MW exposed to mixed hazards. Specifically tailored for safety risk assessment.