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Morphologies of AlNC surface oxides that have undergone different annealing protocols. EDX elemental mapping of (A) unannealed, (B) He-annealed, (C) O2-annealed, and (D) vacuum-annealed single AlNCs. Al is red, O is green, and scale bars are 50 nm. (E) EDX atomic fraction of oxygen for each sample. (F−I) HRTEM of AlNC oxide layers. The measured oxide thickness is marked. (Scale bars are 5 nm.)
