Compositional analysis of different elements present in CMO films from EDS.
| Sample | Cu (at%) | O (at%) | Mg (at%) |
|
Grain size (nm) |
|---|---|---|---|---|---|
| CMO 0 | 46.21 | 53.79 | 0 | 0 | 203 ± 8 |
| CMO 2 | 40.28 | 58.58 | 1.14 | 0.03 (0.04) | 142 ± 4 |
| CMO 4 | 38.94 | 58.79 | 2.28 | 0.06 (0.08) | 106 ± 10 |
| CMO 6 | 38.1 | 58.73 | 3.17 | 0.08 (0.12) | 155 ± 3 |
| CMO 8 | 36.87 | 58.84 | 4.28 | 0.10 (0.16) | 93 ± 4 |
| CMO 10 | 36.10 | 58.84 | 5.06 | 0.12 (0.20) | 102 ± 10 |