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. 2024 Feb 27;11(3):816–865. doi: 10.1021/acsphotonics.3c00457

Table 1. Materials for Metasurface Applications.

applications desired properties material platforms for metasurface applications
passive metasurfaces for lenses, phase shifters, polarization shifters, half-wave plates low optical losses semiconductors such as silicon, germanium, gallium arsenide, traditional and alternative metals, conducting oxides, fused silica, high index dielectrics such as hafnium oxide, titanium oxide, aluminum oxide, diamond, lithium niobate
CMOS compatibility
high mode confinement
beam-steering, telecommunications, and tunable optics low optical losses ITO, AZO, CdO, MoSe2, ZnO, graphene, MXenes, transdimensional materials
CMOS compatibility transition metal dichalcogenides with strong excitonic resonances
ultrafast response phase change materials, liquid crystals
electrical tunability  
optical tunability  
nonlinear optics, including high harmonic generation high field enhancement transition metal nitrides, epitaxial metal films, high-index dielectrics, sapphire, magnesium oxide, epsilon-near-zero media, nonlinear dielectrics such as lithium niobate and barium titanate
large laser damage threshold
time-varying optics, e.g., time refraction and reflection, photonic time crystals large changes in refractive index fast relaxation times transparent conducting oxides, III−V semiconductors such as gallium phosphide