Symbol	Explanation
r s	The distance between an arbitrary predicted nozzle position A and a random location B on the workpiece surface
rs′	The distance between the actual nozzle position A′ and a random location B on the workpiece surface
m(rs)	A mathematical function to describe the line profile of the Jet-ECM MRR
Δx	Nozzle positioning error in X direction
Δy	Nozzle positioning error in Y direction
ε	The deviation between the theoretical MRR and actual MRR
k w	The deviation rate
d	The eigenvalue of the Gaussian function
d i	The diameter of the pit machined by Jet-ECM
r z	The distance from a random point to the symmetry axis
e i	The distance between the nozzle center and the workpiece symmetric center which represents the nozzle revolution radius during the deterministic polishing
ω i	Nozzle moving speed during the deterministic polishing
n i	Nozzle revolution numbers in ei
PV	The surface peak and valley value
CMP	Chemical mechanical polishing
CCOS	Computer-controlled optical surfacing
Jet-ECM	Jet electrochemical machining
MRR	The material removal rate
PSD	The power spectral density