Figure 1.

Schematic of graphene ribbons with an attached proof mass. (a) Three-dimensional diagram of the transducer design. (b) Cross-section of graphene ribbons with an attached proof mass under the applied force. (c) Schematic of the proposed fabrication process of graphene ribbons with an attached proof mass based on SOI (silicon on insulator): (i) Trench etching to define the proof mass. (ii) Backside etching of SOI handle layer. (iii) Integration of graphene with pre-fabricated SOI and patterning of the graphene. (iv) The release of the proof mass by etching the sacrificial layer.