Table 2. Interpretation of the FTIR Peaks Seen for the LiPON Films.

LiOtBu-Based LiPON		Li-HMDS-Based LiPON
cm–1	contribution	cm–1	contribution
470–580	Li–O–P14,36,37	470–580	Li–O–P14,36,37
838	P–N=P38	838	P–N=P38
1024	P–O, P–N14,36	1037	P–O, P–N14,36
1421	CO339	1129	P–N36,40
1470	CH2 deform39
1529	N–H38
1550	N–O stretch41