U11	U22	U33	U12	U13	U23
Cl1	0.1079 (7)	0.0494 (4)	0.0619 (4)	0.000	0.0413 (4)	0.000
O1	0.0531 (7)	0.0434 (7)	0.0391 (6)	0.0010 (5)	0.0201 (5)	−0.0004 (5)
O2	0.0879 (11)	0.0901 (11)	0.0591 (8)	0.0004 (9)	0.0458 (8)	−0.0021 (8)
N4	0.0507 (9)	0.0484 (9)	0.0375 (7)	0.0013 (7)	0.0168 (6)	−0.0010 (6)
N1	0.0547 (9)	0.0476 (8)	0.0434 (8)	−0.0006 (7)	0.0218 (7)	0.0003 (7)
N2	0.0838 (12)	0.0460 (10)	0.0518 (9)	−0.0039 (8)	0.0380 (8)	−0.0053 (7)
O3	0.1057 (15)	0.0670 (11)	0.0814 (13)	0.0140 (9)	0.0413 (13)	−0.0026 (9)
N3	0.0875 (12)	0.0457 (9)	0.0520 (9)	−0.0028 (8)	0.0386 (9)	−0.0040 (7)
C3	0.0413 (9)	0.0428 (9)	0.0346 (8)	−0.0022 (7)	0.0115 (7)	−0.0011 (7)
C1	0.0421 (9)	0.0488 (10)	0.0371 (9)	−0.0036 (8)	0.0133 (7)	−0.0054 (7)
C2	0.0471 (10)	0.0406 (9)	0.0395 (9)	−0.0022 (7)	0.0141 (8)	−0.0009 (7)
C7	0.0604 (11)	0.0395 (9)	0.0421 (9)	0.0029 (8)	0.0189 (8)	0.0033 (7)
C8	0.0408 (9)	0.0546 (11)	0.0361 (8)	−0.0040 (8)	0.0116 (7)	−0.0016 (8)
C6	0.0597 (11)	0.0424 (10)	0.0457 (10)	0.0045 (8)	0.0209 (9)	−0.0018 (8)
C4	0.0628 (12)	0.0398 (10)	0.0493 (10)	0.0033 (8)	0.0245 (9)	0.0018 (8)
C5	0.0633 (12)	0.0445 (10)	0.0476 (10)	0.0016 (9)	0.0228 (9)	0.0079 (8)
C13	0.0592 (12)	0.0552 (11)	0.0469 (10)	−0.0007 (9)	0.0208 (9)	0.0019 (8)
C11	0.0504 (11)	0.0751 (14)	0.0397 (9)	−0.0067 (9)	0.0195 (8)	−0.0036 (9)
C9	0.0597 (12)	0.0548 (12)	0.0446 (10)	−0.0049 (9)	0.0231 (9)	0.0002 (8)
C12	0.0639 (13)	0.0655 (13)	0.0484 (10)	−0.0049 (10)	0.0235 (9)	0.0070 (9)
C10	0.0595 (12)	0.0595 (12)	0.0534 (11)	−0.0021 (9)	0.0236 (9)	−0.0085 (9)
C14	0.0935 (18)	0.0996 (19)	0.0706 (14)	−0.0045 (15)	0.0485 (13)	−0.0172 (13)