U11	U22	U33	U12	U13	U23
O1	0.0291 (5)	0.0253 (5)	0.0245 (4)	0.0031 (4)	−0.0078 (4)	−0.0074 (4)
O2	0.0265 (5)	0.0329 (5)	0.0241 (4)	0.0036 (4)	−0.0062 (4)	0.0087 (4)
O3	0.0301 (5)	0.0309 (5)	0.0183 (4)	−0.0040 (4)	0.0023 (4)	0.0015 (4)
N1	0.0176 (4)	0.0177 (4)	0.0204 (4)	0.0023 (3)	0.0009 (4)	0.0018 (3)
N2	0.0198 (4)	0.0217 (4)	0.0153 (4)	0.0013 (4)	−0.0035 (4)	−0.0007 (3)
N3	0.0169 (4)	0.0219 (4)	0.0181 (4)	−0.0002 (4)	0.0000 (4)	0.0025 (4)
C1	0.0148 (5)	0.0178 (5)	0.0148 (4)	0.0005 (4)	−0.0015 (4)	−0.0007 (4)
C2	0.0159 (5)	0.0177 (5)	0.0193 (5)	0.0007 (4)	0.0000 (4)	−0.0009 (4)
C3	0.0158 (5)	0.0228 (5)	0.0187 (5)	−0.0012 (4)	0.0002 (4)	0.0043 (4)
C4	0.0152 (5)	0.0169 (4)	0.0202 (5)	0.0003 (4)	−0.0004 (4)	−0.0016 (4)
C5	0.0205 (5)	0.0199 (5)	0.0273 (6)	−0.0007 (4)	0.0041 (5)	0.0001 (4)
C6	0.0209 (6)	0.0281 (6)	0.0398 (8)	−0.0038 (5)	0.0087 (6)	−0.0057 (6)
C7	0.0148 (5)	0.0364 (7)	0.0480 (9)	0.0012 (5)	0.0002 (6)	−0.0126 (7)
C8	0.0211 (6)	0.0327 (7)	0.0386 (8)	0.0062 (5)	−0.0096 (6)	−0.0042 (6)
C9	0.0196 (5)	0.0252 (6)	0.0250 (5)	0.0026 (5)	−0.0048 (5)	0.0003 (5)
C10	0.0149 (4)	0.0189 (5)	0.0165 (4)	0.0008 (4)	−0.0006 (4)	0.0005 (4)
C11	0.0248 (6)	0.0200 (5)	0.0214 (5)	−0.0001 (4)	0.0027 (4)	−0.0015 (4)
C12	0.0279 (6)	0.0198 (5)	0.0315 (6)	−0.0018 (5)	0.0004 (5)	0.0020 (5)
C13	0.0214 (6)	0.0280 (6)	0.0305 (6)	−0.0008 (5)	0.0015 (5)	0.0100 (5)
C14	0.0249 (6)	0.0354 (7)	0.0225 (5)	0.0010 (5)	0.0053 (5)	0.0060 (5)
C15	0.0239 (6)	0.0274 (6)	0.0189 (5)	0.0007 (5)	0.0030 (4)	−0.0013 (4)
C16	0.0221 (6)	0.0167 (5)	0.0288 (6)	0.0022 (4)	0.0056 (5)	0.0039 (4)
C17	0.0196 (5)	0.0215 (5)	0.0223 (5)	0.0048 (4)	0.0028 (4)	0.0058 (4)
C18	0.0184 (5)	0.0246 (5)	0.0192 (5)	−0.0017 (4)	−0.0007 (4)	0.0021 (4)
C19	0.0273 (6)	0.0256 (6)	0.0214 (5)	−0.0061 (5)	0.0010 (5)	0.0020 (5)
C20	0.0290 (7)	0.0413 (8)	0.0198 (5)	−0.0061 (6)	−0.0050 (5)	0.0036 (5)
C21	0.0279 (6)	0.0321 (7)	0.0224 (6)	−0.0099 (5)	−0.0031 (5)	0.0003 (5)