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(a) 5 μm × 5 μm AFM image and (b) ECCI scan of the Ge sample with intrinsic LT Ge layer, (c) 5 μm × 5 μm AFM image and (d) ECCI scan of the Ge sample with 5 × 1018 cm−3 P-doped LT Ge layer, (e) 5 μm × 5 μm AFM image and (f) ECCI scan of the Ge sample with 3 × 1018 cm−3 Sb-doped LT Ge layer. The white squares indicate the TDs detected by the ECCI scan.
