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. 2024 Apr 4;14:7969. doi: 10.1038/s41598-024-57937-8

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© The Author(s) 2024

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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(a) HR-XRD 2theta-omega measurements on the (004) plane of samples with P doping density of 0, 1, 3, 5, 10, and 50 × 10¹⁸ cm⁻³, (b) enlarged Ge peaks of the P-doping HR-XRD, indicating the Ge peak shifts to smaller angles with increasing doping density, (c) HR-XRD 2theta-omega measurements of samples on the (004) plane with Sb doping density of 0, 1, 3, 5 and 7 × 10¹⁸ cm⁻³ and (d) enlarged Ge peaks of the Sb-doping HR-XRD, indicating consistent Ge peaks.