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| parameters | CNC film | CNC-APTES film |
|---|---|---|
| reversible frequency shift, Δfrev [Hz] | –11.4 | –15.3 |
| irreversible frequency shift, Δfirr [Hz] | –0.1 | –3.7 |
| reversible dissipation shift, ΔDrev [ppm] | 4.8 | 4.7 |
| irreversible dissipation shift, ΔDirr [ppm] | –0.2 | –0.7 |
| reversible angle shift, Δθrev, ×10–3 [°] | 15.0 | 15.0 |
| irreversible angle shift, Δθirr, ×10–3 [°] | 0.3 | 6.1 |
