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. 2024 Mar 30;15(4):482. doi: 10.3390/mi15040482

Figure 3.

Figure 3

(a) The schematic of MIS process PMUT cell with flat diaphragm. (b) Finite element model and resonant frequency simulation of flat diaphragm PMUT by MIS process. (c) Simulation of potential distribution in flat diaphragm PMUT piezoelectric layer by MIS process. (d) The schematic of MIS process PMUT cell with etched diaphragm. (e) Finite element model and resonant frequency simulation of etched diaphragm PMUT by MIS process. (f) Simulation of potential distribution in etched diaphragm PMUT piezoelectric layer by MIS process.