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. 2024 Mar 30;15(4):482. doi: 10.3390/mi15040482

Figure 7.

Figure 7

(a) The test results of frequency response (upper) and displacement sensitivity (lower) of a PMUT with a radius of 47 μm (flat diaphragm). (b) The test results of frequency response (upper) and displacement sensitivity (lower) of a PMUT with a radius of 47 μm (etched diaphragm. (c) The test results of frequency response (upper) and displacement sensitivity (lower) of a PMUT with a radius of 51 μm (flat diaphragm). (d) The test results of frequency response (upper) and displacement sensitivity (lower) of a PMUT with a radius of 51 μm (etched diaphragm. (e) Comparison of Q value and displacement sensitivity between flat film and etched film PMUT.