Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
The test results of MIS-process PMUT devices.
| PMUT Device (μm) | Resonant Frequency (MHz) | Quality Factor | Displacement Sensitivity (nm/V) |
|---|---|---|---|
| Flat diaphragm of R-38 | 11.99 | 110 | 1.8 |
| Etched diaphragm of R-38 | 9.04 | 139 | 0.78 |
| Flat diaphragm of R-42 | 9.86 | 107.5 | 3.67 |
| Etched diaphragm of R-42 | 8.29 | 193 | 6.23 |
| flat diaphragm of R-47 | 8.37 | 204.8 | 7.26 |
| Etched diaphragm of R-47 | 7.38 | 211.2 | 5.93 |
| Flat diaphragm of R-51 | 7.37 | 217 | 18.49 |
| Etched diaphragm of R-51 | 6.28 | 251 | 9.81 |
