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. 2024 Apr 21;15(4):551. doi: 10.3390/mi15040551

Table 2.

The design parameters of CF application. (a) Each value of the optimal 36-layer thickness for the RGB-filter design, and (b) the schematic structure coating on a flexible HPC substrate (with 2.27–3.11 μm 36-layer thickness and 30 × 30 mm2 dimensions) by the developed IAD-sputtering shadow-mask system.

Layer No. Materials Blue (nm) Materials Green (nm) Materials Red (nm)
1 Nb2O5 88.68 Nb2O5 33.44 Nb2O5 51.37
2 SiO2 72.51 SiO2 208.32 SiO2 95.47
3 Nb2O5 77.72 Nb2O5 53.21 Nb2O5 46.69
4 SiO2 104.64 SiO2 88.38 SiO2 60.74
5 Nb2O5 50.16 Nb2O5 50.8 Nb2O5 58.74
6 SiO2 114.59 SiO2 31.57 SiO2 86.72
7 Nb2O5 63.81 Nb2O5 39.72 Nb2O5 53.51
8 SiO2 90.03 SiO2 87.3 SiO2 89.31
9 Nb2O5 58.52 Nb2O5 52.12 Nb2O5 51.35
10 SiO2 118.93 SiO2 87.14 SiO2 76.69
11 Nb2O5 50.42 Nb2O5 48.13 Nb2O5 85.81
12 SiO2 94.5 SiO2 29.07 SiO2 55.64
13 Nb2O5 68.67 Nb2O5 44.68 Nb2O5 55.37
14 SiO2 95.41 SiO2 88.81 SiO2 89.31
15 Nb2O5 59.86 Nb2O5 55.83 Nb2O5 47.77
16 SiO2 94.52 SiO2 70.86 SiO2 85.07
17 Nb2O5 68.84 Nb2O5 117.67 Nb2O5 117.88
18 SiO2 91.41 SiO2 99.89 SiO2 45.9
19 Nb2O5 61.59 Nb2O5 72.11 Nb2O5 47.98
20 SiO2 109.15 SiO2 97.2 SiO2 64.15
21 Nb2O5 76.77 Nb2O5 99.87 Nb2O5 52.39
22 SiO2 167.97 SiO2 109.35 SiO2 79.56
23 Nb2O5 75.99 Nb2O5 60.94 Nb2O5 20.62
24 SiO2 109.41 SiO2 129.06 SiO2 71.25
25 Nb2O5 64.96 Nb2O5 75.56 Nb2O5 47.44
26 SiO2 101.2 SiO2 141.68 SiO2 42.11
27 Nb2O5 86.55 Nb2O5 63.64 Nb2O5 46.29
28 SiO2 166.54 SiO2 98.73 SiO2 66.22
29 Nb2O5 68.15 Nb2O5 89.84 Nb2O5 54.71
30 SiO2 115.67 SiO2 130.8 SiO2 78.49
31 Nb2O5 64.19 Nb2O5 70.27 Nb2O5 63.17
32 SiO2 88.72 SiO2 105.79 SiO2 76.52
33 Nb2O5 76.02 Nb2O5 98.46 Nb2O5 51.69
34 SiO2 91.92 SiO2 32.49 SiO2 67.28
35 Nb2O5 69.49 Nb2O5 70.49 Nb2O5 42.73
36 SiO2 53.92 SiO2 30.19 SiO2 40.63
Total (μm) 3.11 2.86 2.21
graphic file with name micromachines-15-00551-i005.jpg
(a)
graphic file with name micromachines-15-00551-i006.jpg
(b)