Table 2.
The design parameters of CF application. (a) Each value of the optimal 36-layer thickness for the RGB-filter design, and (b) the schematic structure coating on a flexible HPC substrate (with 2.27–3.11 μm 36-layer thickness and 30 × 30 mm2 dimensions) by the developed IAD-sputtering shadow-mask system.
Layer No. | Materials | Blue (nm) | Materials | Green (nm) | Materials | Red (nm) |
---|---|---|---|---|---|---|
1 | Nb2O5 | 88.68 | Nb2O5 | 33.44 | Nb2O5 | 51.37 |
2 | SiO2 | 72.51 | SiO2 | 208.32 | SiO2 | 95.47 |
3 | Nb2O5 | 77.72 | Nb2O5 | 53.21 | Nb2O5 | 46.69 |
4 | SiO2 | 104.64 | SiO2 | 88.38 | SiO2 | 60.74 |
5 | Nb2O5 | 50.16 | Nb2O5 | 50.8 | Nb2O5 | 58.74 |
6 | SiO2 | 114.59 | SiO2 | 31.57 | SiO2 | 86.72 |
7 | Nb2O5 | 63.81 | Nb2O5 | 39.72 | Nb2O5 | 53.51 |
8 | SiO2 | 90.03 | SiO2 | 87.3 | SiO2 | 89.31 |
9 | Nb2O5 | 58.52 | Nb2O5 | 52.12 | Nb2O5 | 51.35 |
10 | SiO2 | 118.93 | SiO2 | 87.14 | SiO2 | 76.69 |
11 | Nb2O5 | 50.42 | Nb2O5 | 48.13 | Nb2O5 | 85.81 |
12 | SiO2 | 94.5 | SiO2 | 29.07 | SiO2 | 55.64 |
13 | Nb2O5 | 68.67 | Nb2O5 | 44.68 | Nb2O5 | 55.37 |
14 | SiO2 | 95.41 | SiO2 | 88.81 | SiO2 | 89.31 |
15 | Nb2O5 | 59.86 | Nb2O5 | 55.83 | Nb2O5 | 47.77 |
16 | SiO2 | 94.52 | SiO2 | 70.86 | SiO2 | 85.07 |
17 | Nb2O5 | 68.84 | Nb2O5 | 117.67 | Nb2O5 | 117.88 |
18 | SiO2 | 91.41 | SiO2 | 99.89 | SiO2 | 45.9 |
19 | Nb2O5 | 61.59 | Nb2O5 | 72.11 | Nb2O5 | 47.98 |
20 | SiO2 | 109.15 | SiO2 | 97.2 | SiO2 | 64.15 |
21 | Nb2O5 | 76.77 | Nb2O5 | 99.87 | Nb2O5 | 52.39 |
22 | SiO2 | 167.97 | SiO2 | 109.35 | SiO2 | 79.56 |
23 | Nb2O5 | 75.99 | Nb2O5 | 60.94 | Nb2O5 | 20.62 |
24 | SiO2 | 109.41 | SiO2 | 129.06 | SiO2 | 71.25 |
25 | Nb2O5 | 64.96 | Nb2O5 | 75.56 | Nb2O5 | 47.44 |
26 | SiO2 | 101.2 | SiO2 | 141.68 | SiO2 | 42.11 |
27 | Nb2O5 | 86.55 | Nb2O5 | 63.64 | Nb2O5 | 46.29 |
28 | SiO2 | 166.54 | SiO2 | 98.73 | SiO2 | 66.22 |
29 | Nb2O5 | 68.15 | Nb2O5 | 89.84 | Nb2O5 | 54.71 |
30 | SiO2 | 115.67 | SiO2 | 130.8 | SiO2 | 78.49 |
31 | Nb2O5 | 64.19 | Nb2O5 | 70.27 | Nb2O5 | 63.17 |
32 | SiO2 | 88.72 | SiO2 | 105.79 | SiO2 | 76.52 |
33 | Nb2O5 | 76.02 | Nb2O5 | 98.46 | Nb2O5 | 51.69 |
34 | SiO2 | 91.92 | SiO2 | 32.49 | SiO2 | 67.28 |
35 | Nb2O5 | 69.49 | Nb2O5 | 70.49 | Nb2O5 | 42.73 |
36 | SiO2 | 53.92 | SiO2 | 30.19 | SiO2 | 40.63 |
Total (μm) | 3.11 | 2.86 | 2.21 | |||
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(a) | ||||||
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(b) |